<?xml version="1.0" encoding="UTF-8"?>
<urlset xmlns="http://www.sitemaps.org/schemas/sitemap/0.9" xmlns:news="http://www.google.com/schemas/sitemap-news/0.9" xmlns:xhtml="http://www.w3.org/1999/xhtml" xmlns:image="http://www.google.com/schemas/sitemap-image/1.1" xmlns:video="http://www.google.com/schemas/sitemap-video/1.1">
    
  <url>
    <loc>https://docs.atomscale.ai/api-reference/authentication</loc>
    <lastmod>2026-02-12T20:31:50.468Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/data-catalogue/delete</loc>
    <lastmod>2026-02-12T15:47:33.843Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/data-catalogue/get-processed</loc>
    <lastmod>2026-02-12T20:31:50.469Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/data-catalogue/get-raw</loc>
    <lastmod>2026-02-12T20:31:50.470Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/data-catalogue/list</loc>
    <lastmod>2026-02-12T20:31:50.474Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference</loc>
    <lastmod>2026-02-01T21:09:41.380Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/metrology/finalize-stream</loc>
    <lastmod>2026-02-12T20:31:50.471Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/metrology/ingest-chunk</loc>
    <lastmod>2026-02-12T20:31:50.472Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/metrology/ingest-chunk-multi</loc>
    <lastmod>2026-02-12T20:31:50.472Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/metrology/initialize-stream</loc>
    <lastmod>2026-02-12T20:31:50.473Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/metrology/timeseries</loc>
    <lastmod>2026-02-12T20:31:50.474Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/optical/frames</loc>
    <lastmod>2026-02-12T20:31:50.471Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/optical/timeseries</loc>
    <lastmod>2026-02-12T20:31:50.667Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/projects/create</loc>
    <lastmod>2026-02-12T15:47:33.847Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/projects/get-samples</loc>
    <lastmod>2026-02-12T20:31:50.669Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/projects/list</loc>
    <lastmod>2026-02-12T20:31:50.668Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/projects/update-samples</loc>
    <lastmod>2026-02-12T15:47:34.074Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/rheed/end-stream</loc>
    <lastmod>2026-02-12T20:31:50.666Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/rheed/fingerprint</loc>
    <lastmod>2026-02-12T20:31:50.666Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/rheed/mask</loc>
    <lastmod>2026-02-12T20:31:50.669Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/rheed/start-stream</loc>
    <lastmod>2026-02-12T20:31:50.672Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/rheed/timeseries</loc>
    <lastmod>2026-02-12T20:31:50.671Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/samples/create</loc>
    <lastmod>2026-02-12T15:47:34.077Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/samples/delete</loc>
    <lastmod>2026-02-12T15:47:34.078Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/samples/list</loc>
    <lastmod>2026-02-12T20:31:50.670Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/sem/fingerprint</loc>
    <lastmod>2026-02-12T20:31:50.672Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/spectroscopy/photoluminescence</loc>
    <lastmod>2026-02-12T20:31:50.846Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/spectroscopy/raman</loc>
    <lastmod>2026-02-12T20:31:50.849Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/spectroscopy/xps</loc>
    <lastmod>2026-02-12T20:31:50.848Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/upload/complete-upload</loc>
    <lastmod>2026-02-12T15:47:34.302Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/upload/get-timeseries</loc>
    <lastmod>2026-02-12T15:47:34.307Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/api-reference/upload/get-upload-urls</loc>
    <lastmod>2026-02-12T20:31:50.849Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/case-studies</loc>
    <lastmod>2026-03-09T23:20:23.705Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/characterization/ellipsometry</loc>
    <lastmod>2026-02-12T17:43:48.495Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/characterization</loc>
    <lastmod>2026-02-12T19:19:23.148Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/characterization/optical-images</loc>
    <lastmod>2026-02-12T01:04:53.106Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/characterization/photoluminescence</loc>
    <lastmod>2026-02-12T01:04:53.109Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/characterization/raman</loc>
    <lastmod>2026-02-12T01:04:53.102Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/characterization/rheed</loc>
    <lastmod>2026-02-12T17:43:48.497Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/characterization/sem</loc>
    <lastmod>2026-02-12T17:43:48.499Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/characterization/sims</loc>
    <lastmod>2026-02-12T01:04:53.103Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/characterization/xps</loc>
    <lastmod>2026-02-12T17:43:48.500Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/get-started/act</loc>
    <lastmod>2026-02-12T01:04:53.104Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/get-started/analyze</loc>
    <lastmod>2026-02-12T18:34:10.918Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/get-started/connect</loc>
    <lastmod>2026-02-12T15:42:07.026Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/get-started</loc>
    <lastmod>2026-02-11T16:44:13.686Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/guides/detect-anomalies</loc>
    <lastmod>2026-02-12T20:04:04.153Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/guides/diagnose-run-differences</loc>
    <lastmod>2026-02-12T15:42:07.025Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/guides/identify-uniformity-issues</loc>
    <lastmod>2026-02-12T15:42:07.028Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/guides</loc>
    <lastmod>2026-02-11T16:44:14.407Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform</loc>
    <lastmod>2026-02-11T16:44:14.405Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/accessibility</loc>
    <lastmod>2026-02-11T23:22:14.341Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/connecting-data/file-watcher</loc>
    <lastmod>2026-03-13T16:50:46.642Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/connecting-data/manual-upload</loc>
    <lastmod>2026-02-12T15:42:07.193Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/connecting-data/programmatic</loc>
    <lastmod>2026-02-12T15:42:07.192Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/connecting-data/screen-capture</loc>
    <lastmod>2026-02-12T15:42:07.195Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/faq</loc>
    <lastmod>2026-03-09T23:20:23.707Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/ip-and-data</loc>
    <lastmod>2026-02-12T01:04:55.229Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/models/data-items</loc>
    <lastmod>2026-02-11T23:02:20.614Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/models</loc>
    <lastmod>2026-02-12T01:04:55.234Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/models/projects</loc>
    <lastmod>2026-02-11T23:02:20.848Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/models/samples</loc>
    <lastmod>2026-02-11T23:02:20.849Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/onboarding</loc>
    <lastmod>2026-02-12T15:42:07.209Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/security</loc>
    <lastmod>2026-02-12T01:04:55.376Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/workflows/anomaly-detection</loc>
    <lastmod>2026-02-12T20:04:04.154Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/workflows</loc>
    <lastmod>2026-02-12T18:34:11.264Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/workflows/similarity</loc>
    <lastmod>2026-02-12T01:04:55.374Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/reference/workflows/tool-state</loc>
    <lastmod>2026-02-12T19:39:55.293Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/solutions</loc>
    <lastmod>2026-02-12T15:42:07.322Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/platform/use-cases</loc>
    <lastmod>2026-02-11T16:44:15.575Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/sdk</loc>
    <lastmod>2026-02-12T20:09:36.701Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/sdk/inspect-results</loc>
    <lastmod>2026-02-12T20:09:36.698Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/sdk/poll-timeseries</loc>
    <lastmod>2026-02-12T20:09:36.697Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/sdk/poll-trajectory</loc>
    <lastmod>2026-02-12T20:09:36.700Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/sdk/quickstart</loc>
    <lastmod>2026-02-12T20:14:42.220Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/sdk/reference/client</loc>
    <lastmod>2026-02-12T20:09:36.702Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/sdk/reference/streaming</loc>
    <lastmod>2026-02-12T20:09:36.705Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/sdk/samples-projects</loc>
    <lastmod>2026-02-12T20:10:16.145Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/sdk/search-data</loc>
    <lastmod>2026-02-12T20:09:36.704Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/sdk/stream-metrology</loc>
    <lastmod>2026-02-12T20:10:16.382Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/sdk/stream-rheed</loc>
    <lastmod>2026-02-12T20:09:36.699Z</lastmod>
  </url>

  <url>
    <loc>https://docs.atomscale.ai/sdk/upload-data</loc>
    <lastmod>2026-02-12T20:09:36.896Z</lastmod>
  </url>
</urlset>