📐In-situ Proxy for Ex-situ Measurements

Correlating diffraction features with ex-situ composition measurements enables near real-time information about composition in future runs.

Automated information extraction identifies and quantifies relationships between recipe and tool metrology, in-situ monitoring, and ex-situ characterization without adding time to your workflow.

Original RHEED image

RHEED pattern metrics were found to correlate with doping concentration determined by ex-situ XPS

The top 3 pattern features correlated with doping-composition from XPS and fit a linear regression.

The derived linear relationship from three initial samples was used to predict concentrations for remaining samples with good agreement to the model.