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Ellipsometry analysis imports spectroscopic ellipsometry data and extracts per-wavelength timeseries for psi, delta, depolarization, and incident intensity. It supports batch file uploads and real-time streaming from supported instruments.

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Overview

The ellipsometry pipeline processes data in three stages:
  1. Data import: reads raw instrument text exports, handling single files, directories, and compressed archives
  2. Data structuring: parses measurements into a normalized table with columns for time, wavelength, psi, delta, depolarization, and incident intensity
  3. Timeseries construction: pivots the table by metric and wavelength, producing one timeseries per (metric, wavelength) pair

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Key Metrics

MetricWhat It Tells You
PsiAmplitude ratio of p- and s-polarized reflected light, in degrees. Sensitive to film thickness and optical properties.
DeltaPhase difference between p- and s-polarized reflected light, in degrees. Sensitive to thin film changes.
DepolarizationFraction of depolarized light. Indicates surface roughness, thickness non-uniformity, or backside reflections.
Incident intensityIntensity of the incident beam at each wavelength. Useful for monitoring source stability.
Each metric is extracted per wavelength, producing one timeseries per (metric, wavelength) pair with property names like psi_400.5 or delta_550.2.

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Adding Ellipsometry Data

You can add ellipsometry data in two ways: uploading data files, or streaming live from your instrument.

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Upload

Upload ellipsometry data files through the data management page. The pipeline accepts single files, directories of files, and compressed archives (.zip, .tar, .gz, .tgz, .bz2). Analysis begins automatically once the upload completes.

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Viewing Results

Once processing completes (or during a live stream), ellipsometry data is displayed in the standard chart view.Timeseries chart: The main analysis view. Each timeseries corresponds to a single metric at a single wavelength (e.g., psi_400.5 or delta_550.2). Use the series toggle in the settings drawer to show or hide individual timeseries.Chart controls:
  • X-axis type: Switch between relative time and absolute timestamps
  • Pan and zoom: Navigate along the time axis to focus on specific intervals
  • Tooltips: Hover over data points to see values and units
  • Multiple charts: Add additional charts and sync them to compare different metrics side by side

Detect Anomalies During a Run

Use ellipsometry timeseries as part of real-time growth monitoring.

Identify Uniformity Issues

Analyze ellipsometry data consistency across a growth.