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A run can look acceptable in aggregate but contain internal variation that affects device performance: early-stage drift, mid-run excursions, or layer-to-layer inconsistency. Atomscale catches these by inspecting a run over time and by comparing segments of it against the rest of your dataset.

Two Approaches to Uniformity

The same tools used to diagnose why runs differ apply within a single run. Instead of comparing entire runs, you look at how the run behaves across its own phases, layers, or time windows.
Inspect a single run over time to see where its behavior changes.The Monitor session view replays a run with its growth metrics, tool state, and detected events on one timeline. Watching how the metrics evolve across the run reveals drift, excursions, and phases that behave differently from the rest.What you see:
  • Growth metrics charts of derived RHEED metrics across the full run, where drift and excursions show up as the values move
  • Tool state instrument parameters synchronized with the metrics, giving context for why a particular stretch of the run varied
  • Activity timeline of detected changepoints, marking the moments where the run’s behavior shifted

Setting Up

1

Open the run on the Monitor page

Select the session from the Sessions sidebar on the Monitor page.
2

Replay the run end to end

Use the playback bar to scrub through the run, or follow the live edge for an active one. See Session View.
3

Watch the metrics across phases

Look for stretches where a metric drifts away from the run’s earlier behavior, or where one phase, layer, or cycle spreads more than the others.
4

Use the activity timeline

Open the Activity tab to see detected changepoints. These mark transitions between phases and the moments where uniformity breaks down.

What to Look For

Drift Over Time

Segments that gradually shift away from early-run behavior indicate drift. In the Monitor session view, this appears as growth metrics that steadily trend away from where they started. In Explore Similarity, drifting segments form a gradient on the map rather than a tight cluster.

Outlier Segments

A single segment that diverges sharply from the rest points to a transient disturbance, easiest to spot in Explore Similarity where the outlier sits visibly apart.

Phase-Specific Variation

Some recipe phases may be consistently less uniform than others. If segments from one phase always spread more widely, that phase likely needs tighter process control. The Monitor session view makes this visible in the growth metrics, showing which derived properties vary most during the problematic phase.

Periodic Structure Consistency

For multilayers and superlattices, watch how each cycle behaves in the growth metrics on the Monitor session view. Consistent cycles repeat nearly identical metric patterns. If early cycles differ from late cycles, or if specific cycles stand out, the time-resolved view shows exactly where within the cycle the variation occurs. Explore Similarity complements this: plot the cycles on the map and consistent ones cluster tightly while outliers separate.

Connecting Uniformity to Outcomes

Within-run uniformity metrics become most valuable when connected to final device or material properties. Runs with tight internal clustering tend to produce more consistent outcomes. If loosely clustered runs correlate with degraded performance, that gives you a quantitative uniformity threshold to monitor against.

Choosing the Right Approach

ScenarioApproachWhy
Seeing where within a run a cycle or phase variesMonitor session viewTime-resolved metrics and changepoints show exactly when the run’s behavior shifts
Checking whether all segments in a run are consistentExplore SimilarityImmediately reveals outliers and clustering without pre-selecting references
Identifying which recipe phase has the most variationExplore SimilaritySegments from different phases naturally separate on the map if they behave differently
Understanding why a specific layer is differentMonitor session viewDetailed metrics and tool state pinpoint what changed during that layer
Tracking uniformity improvement across iterationsExplore SimilarityCompare segment clustering tightness across runs to see if uniformity is improving

Next Steps

Diagnose Why Runs Differ

Compare entire runs against each other when the issue is between runs rather than within one.

Detect Anomalies

Set up automated detection to catch uniformity problems as they develop during active runs.