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The final step in the Atomscale workflow is acting on the information extracted from your process data. The Analyze step gives you the insights: similarity trajectories, derived metrics, and within-run uniformity. This page covers what you do with those insights: detecting problems automatically, deciding how to respond, and progressively closing the loop toward automated control.

Alerts and Anomaly Detection

Atomscale’s alerting system operates on our derived intelligence layer that holistically profiles growths, allowing them to catch problems that are invisible to conventional monitoring that operates on fixed combinations of sensors.
Traditional alerting operates on tool state: temperature out of range, pressure spike, flow rate deviation. Atomscale alerts operate on materials state: the derived metrics that describe what’s actually happening to the film being deposited.
Traditional AlertingAtomscale Alerting
Temperature exceeds setpointPredicted composition drifting from target
Pressure outside rangeSurface reconstruction deviating from expected sequence
Flow rate dropRun trajectory diverging from process fingerprint library
Manual RHEED observationQuantitative lattice spacing or spot count anomaly
Atomscale’s anomaly detection has demonstrated greater than 96% accuracy and can flag issues 40 seconds earlier than manually monitoring the same process visually.

Types of Alerts

Atomscale continuously scores each run against your process fingerprint library. When a run’s trajectory diverges from expected behavior, an alert fires, even if every individual tool parameter looks normal.This is particularly valuable for catching subtle defects like compositional drift or surface quality degradation that don’t manifest in any single sensor reading.

Setting Up Alerts

1

Choose an Alert Type

Select from anomaly detection (automatic, model-driven), drift tracking (cross-run trending), or threshold-based (explicit limits on derived metrics).
2

Define Scope

Specify which data streams, runs, or recipes the alert applies to. Alerts can be scoped to a specific tool, material system, or recipe family.
3

Set Severity and Notification

Assign a severity level (Info, Warning, or Critical) and configure how you’re notified: in-app, email, or webhook for integration with external systems.
4

Tune Sensitivity

Start with conservative thresholds and tighten as you build confidence in normal process variation. Atomscale provides alert history to help you calibrate sensitivity and reduce false positives.

Respond to Anomalies

When an alert fires, the next step is deciding what to do. Atomscale supports a range of responses depending on the severity and your integration level.

Operator-in-the-Loop

For most teams starting with Atomscale, the initial workflow is operator-assisted: Atomscale detects and surfaces the issue, and a human decides what to do.

Investigate

Click through from an alert to the Analyze view. Compare the flagged run against reference runs to understand exactly what diverged and when.

Annotate

Log observations and decisions directly on the run timeline. These annotations feed back into your process library for future reference.

Adjust

Use the alert context to decide on recipe adjustments: modify setpoints, extend or shorten growth stages, or compensate for detected drift.

Abort

For critical anomalies, decide to terminate a run early rather than wasting time and materials on a doomed process.

Run Disposition

After a run completes, Atomscale’s analysis helps with go/no-go decisions before committing to downstream processing or characterization. Rather than waiting days or weeks for ex-situ measurement results, you can use in-process predictions to triage runs immediately.

Integrating Process Control

For teams ready to move beyond operator-assisted monitoring, Atomscale supports progressively tighter integration with AI-driven process control.
Closed-loop control requires careful validation. Most teams start with monitoring and alerting, build confidence in Atomscale’s predictions, and then incrementally close the loop. The integration roadmap below reflects this progression.

Integration Levels

1

Monitor and Alert

Atomscale observes and notifies. All decisions and actions are made by operators. This is where most teams start.
2

Recommend

Atomscale suggests specific adjustments based on detected deviations. For example, recommending a flux correction when predicted composition drifts from target. Operators review and execute.
3

Assist

Atomscale sends adjustment commands to the process controller via SECS/GEM or tool API, with operator approval required before execution.
4

Autonomous Control

Atomscale continuously monitors and adjusts the process in real-time without operator intervention. The system optimizes for consistency of output (the target material properties) rather than consistency of tool setpoints.

Agent-Based Process Control

At the most advanced integration level, Atomscale’s AI agent acts as a process copilot. The agent combines real-time derived metrics with the full process fingerprint library to make context-aware decisions. Key capabilities include:
  • Real-time recipe adjustment: Modify growth parameters mid-run to correct for detected deviations, such as adjusting source temperatures to maintain target composition.
  • Natural language customization: Configure agent behavior and decision context using natural language instructions, adapting the scope and sensitivity of automated control without code changes.
  • Audit trail: Every automated action is logged with full context: what was detected, what the agent decided, and what command was sent. This provides complete traceability for process validation.

Track and Review

Acting on process data is only valuable if you can measure whether those actions improved outcomes. Atomscale provides tools to close the learning loop.

Run Reports

Each run generates a summary that includes:
Derived metrics timeline with key events and transitions highlighted
Comparison to target values and reference baselines
Any anomalies detected and actions taken (manual or automated)
Annotations and operator notes

Process Improvement Tracking

Over time, track how interventions, whether manual adjustments informed by Atomscale or automated corrections, affect yield and process stability. This historical record is what transforms individual run insights into systematic process improvement.

Next Steps

You’ve completed the getting started guide! Continue exploring: